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Marker studies of nickel silicide formation
Includes bibliographical references.
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| Main Author: | |
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| Other Authors: | |
| Format: | Thesis |
| Language: | English |
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Department of Physics
2015
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| _version_ | 1867613806180433920 |
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| access_status_str | Open Access |
| author | McLeod, John Edward |
| author2 | Comrie, Craig M |
| author_browse | Comrie, Craig M McLeod, John Edward |
| author_facet | Comrie, Craig M McLeod, John Edward |
| author_sort | McLeod, John Edward |
| collection | Thesis |
| description | Includes bibliographical references. |
| format | Thesis |
| id | oai:open.uct.ac.za:11427/15903 |
| institution | University of Cape Town (South Africa) |
| language | eng |
| last_indexed | 2026-06-10T12:41:59.920Z |
| license_str | Not specified — see source repository |
| provenance_str_mv | Harvested via OAI-PMH from UCTD — University of Cape Town Open Access Repository |
| publishDate | 2015 |
| publishDateRange | 2015 |
| publishDateSort | 2015 |
| publisher | Department of Physics |
| publisherStr | Department of Physics |
| record_format | dspace |
| source_str | UCTD — University of Cape Town Open Access Repository |
| spelling | oai:open.uct.ac.za:11427/15903 Marker studies of nickel silicide formation McLeod, John Edward Comrie, Craig M Pretorius, R Physics Silicides Nickel compounds Tracers (Chemistry) Biochemical markers Includes bibliographical references. Atomic diffusion during the solid state formation of thin films of nickel silicides (Ni2Si and NiSi) from nickel and amorphous silicon has been investigated using 31Si radioactive tracer and inert marker techniques. Samples were prepared by vacuum deposition of thin films of nickel and silicon, followed by thermal annealing to effect silicide growth. The radioactive tracer investigation of Ni2Si showed nickel to be the diffusing species during silicide growth. Sharply defined Ni2si* profiles of 100% radioactive concentration at the sample surface were - obtained. The results are compared with previous results in which the profiles were more spread out and of lower surface concentration. The radioactive tracer investigation of NiSi formation showed that nickel is also the diffusing species during second phase growth. The NiSi * layer was found to be of 100% concentration. Some spreading of the activity profile near the NiSi/NiSi* interface was observed. The results were consistent with previous 31Si tracer work on NiSi formation and also with the present Ni * 2Si results. The inert marker investigation used an ultra-thin (5-10 A) continuous layer of Mo or Ta to monitor atomic movement during silicide growth. The results confirmed nickel to be the diffusing species during the growth of both phases. These results are in excellent agreement with previous inert marker studies of nickel silicide growth. 2015-12-20T15:43:47Z 2015-12-20T15:43:47Z 1988 Master Thesis Masters MSc http://hdl.handle.net/11427/15903 eng application/pdf Department of Physics Faculty of Science University of Cape Town |
| spellingShingle | Physics Silicides Nickel compounds Tracers (Chemistry) Biochemical markers McLeod, John Edward Marker studies of nickel silicide formation |
| thesis_degree_str | Master's |
| title | Marker studies of nickel silicide formation |
| title_full | Marker studies of nickel silicide formation |
| title_fullStr | Marker studies of nickel silicide formation |
| title_full_unstemmed | Marker studies of nickel silicide formation |
| title_short | Marker studies of nickel silicide formation |
| title_sort | marker studies of nickel silicide formation |
| topic | Physics Silicides Nickel compounds Tracers (Chemistry) Biochemical markers |
| url | http://hdl.handle.net/11427/15903 |
| work_keys_str_mv | AT mcleodjohnedward markerstudiesofnickelsilicideformation |