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The development of a predictive autofocus algorithm using a general image formation model

Bibliography: pages 97-99.

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Main Author: Nicolls, Frederick C
Other Authors: De Jager, Gerhard
Format: Thesis
Language:English
Published: Department of Electrical Engineering 2016
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access_status_str Open Access
author Nicolls, Frederick C
author2 De Jager, Gerhard
author_browse De Jager, Gerhard
Nicolls, Frederick C
author_facet De Jager, Gerhard
Nicolls, Frederick C
author_sort Nicolls, Frederick C
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description Bibliography: pages 97-99.
format Thesis
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institution University of Cape Town (South Africa)
language eng
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license_str Not specified — see source repository
provenance_str_mv Harvested via OAI-PMH from UCTD — University of Cape Town Open Access Repository
publishDate 2016
publishDateRange 2016
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publisher Department of Electrical Engineering
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spelling oai:open.uct.ac.za:11427/21760 The development of a predictive autofocus algorithm using a general image formation model Nicolls, Frederick C De Jager, Gerhard Sewell, Bryan Trevor Electrical Engineering Bibliography: pages 97-99. This were outlines the development of a general imaging model for use in autofocus, astigmatism correction, and resolution analysis. The model is based on the modulation transfer function of the imaging system in the presence of aberrations, in particular defocus. The extension of the model to include astigmatism is also included. The signals used are related to the ratios of the Fourier transforms of images captured under different operating conditions. Methods are developed for working with these signals in a consistent manner. The model described is then applied to the problem of autofocus. A general autofocus algorithm is presented and results given which reflect the predictive properties of this model. The imaging system used for the generation of results was a scanning electron microscope, although the conclusions should be valid across a far wider range of instruments. It is however the specific requirements of the SEM that make the generalisation presented here particularly useful. 2016-09-14T12:56:11Z 2016-09-14T12:56:11Z 1995 Master Thesis Masters MSc (Eng) http://hdl.handle.net/11427/21760 eng application/pdf Department of Electrical Engineering Faculty of Engineering and the Built Environment University of Cape Town
spellingShingle Electrical Engineering
Nicolls, Frederick C
The development of a predictive autofocus algorithm using a general image formation model
thesis_degree_str Master's
title The development of a predictive autofocus algorithm using a general image formation model
title_full The development of a predictive autofocus algorithm using a general image formation model
title_fullStr The development of a predictive autofocus algorithm using a general image formation model
title_full_unstemmed The development of a predictive autofocus algorithm using a general image formation model
title_short The development of a predictive autofocus algorithm using a general image formation model
title_sort development of a predictive autofocus algorithm using a general image formation model
topic Electrical Engineering
url http://hdl.handle.net/11427/21760
work_keys_str_mv AT nicollsfrederickc thedevelopmentofapredictiveautofocusalgorithmusingageneralimageformationmodel
AT nicollsfrederickc developmentofapredictiveautofocusalgorithmusingageneralimageformationmodel