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Microwave plasma synthesis of nano-sized silicon carbide at atmospheric pressure

Dissertation (MEng)--University of Pretoria, 2015.

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Other Authors: Slabber, Johan F.M.
Format: Thesis
Language:English
Published: University of Pretoria 2015
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access_status_str Open Access
author2 Slabber, Johan F.M.
author_browse Slabber, Johan F.M.
author_facet Slabber, Johan F.M.
collection Thesis
dc_rights_str_mv © 2015 University of Pretoria. All rights reserved. The copyright in this work vests in the University of Pretoria. No part of this work may be reproduced or transmitted in any form or by any means, without the prior written permission of the University of Pretoria.
description Dissertation (MEng)--University of Pretoria, 2015.
format Thesis
id oai:repository.up.ac.za:2263/43762
institution University of Pretoria (South Africa)
language English
last_indexed 2026-06-10T12:36:09.504Z
license_str Other — see source repository
provenance_str_mv Harvested via OAI-PMH from UPSpace — University of Pretoria Institutional Repository
publishDate 2015
publishDateRange 2015
publishDateSort 2015
publisher University of Pretoria
publisherStr University of Pretoria
record_format dspace
source_str UPSpace — University of Pretoria Institutional Repository
spelling oai:repository.up.ac.za:2263/43762 Microwave plasma synthesis of nano-sized silicon carbide at atmospheric pressure Slabber, Johan F.M. Crouse, Philippus L. Meyer, Josua P. Van Laar, Jean H. Plasma chemistry Silicon carbide Microwave plasma Nanoparticles UCTD Engineering, built environment and information technology theses SDG-09 SDG-09: Industry, innovation and infrastructure Engineering, built environment and information technology theses SDG-12 SDG-12: Responsible consumption and production Engineering, built environment and information technology theses SDG-07 SDG-07: Affordable and clean energy Dissertation (MEng)--University of Pretoria, 2015. The favourable physical and mechanical properties of silicon carbide (SiC) nanopowders allow application across many areas, including high-power, high-frequency electronics and high-temperature technologies. Many different synthesis methods for the creation of SiC nanoparticles have been studied, including carbothermic reduction, pulsed laser deposition, sol-gel processes, microwave heating and various plasma techniques. Among the different synthesis methods reported in the literature, very few experiments investigate the microwave-induced plasma synthesis of SiC nanoparticles. The few reported studies show promising results with regard to particle size and production rate. In this work, the synthesis of SiC nanoparticles from methyltrichlorosilane (MTS) is reported using a microwave-induced plasma, operating at atmospheric pressure. The investigation was done experimentally using a 1 500 W power supply, a microwave generator operating at 2.45 GHz, a stub tuner, a waveguide and a sliding short. Quartz tubes were used, in which the plasma was generated and maintained. Hydrogen served as an added reductant for the conversion reaction, and argon served as the MTS carrier gas. The parameters studied were the H2:MTS molar ratio and the total enthalpy, in the ranges 0 to 10 and 70 to 220 MJ/kg respectively. X-ray diffraction studies confirmed the presence of β-SiC and optical emission spectrometry showed the majority of peaks to be that of elementary silicon, carbon and argon, indicative of MTS decomposition in the plasma. Scanning electron microscopy shows average individual particle sizes ranging between 50 and 135 nm, whereas transmission electron microscopy shows average individual particle sizes ranging from 15 to 140 nm. Larger agglomerates are also present, ranging in sizes from 460 to 1 800 nm. Through response surface methodology (RSM), it was shown that the optimum conditions for the production of nanoparticles lie within the range of enthalpy > 180 MJ/kg and H2:MTS ratio of > 5. mi2025 Mechanical and Aeronautical Engineering MEng Unrestricted SDG-09: Industry, innovation and infrastructure DG-12: Responsible consumption and production SDG-07: Affordable and clean energy 2015-02-23T10:10:11Z 2015-02-23T10:10:11Z 2015-04 2015 Dissertation Van Laar, JH 2015, Microwave plasma synthesis of nano-sized silicon carbide at atmospheric pressure, MEng Dissertation, University of Pretoria, Pretoria, viewed yymmdd <http://hdl.handle.net/2263/43762> A2015 http://hdl.handle.net/2263/43762 en © 2015 University of Pretoria. All rights reserved. The copyright in this work vests in the University of Pretoria. No part of this work may be reproduced or transmitted in any form or by any means, without the prior written permission of the University of Pretoria. application/pdf University of Pretoria
spellingShingle Plasma chemistry
Silicon carbide
Microwave plasma
Nanoparticles
UCTD
Engineering, built environment and information technology theses SDG-09
SDG-09: Industry, innovation and infrastructure
Engineering, built environment and information technology theses SDG-12
SDG-12: Responsible consumption and production
Engineering, built environment and information technology theses SDG-07
SDG-07: Affordable and clean energy
Microwave plasma synthesis of nano-sized silicon carbide at atmospheric pressure
title Microwave plasma synthesis of nano-sized silicon carbide at atmospheric pressure
title_full Microwave plasma synthesis of nano-sized silicon carbide at atmospheric pressure
title_fullStr Microwave plasma synthesis of nano-sized silicon carbide at atmospheric pressure
title_full_unstemmed Microwave plasma synthesis of nano-sized silicon carbide at atmospheric pressure
title_short Microwave plasma synthesis of nano-sized silicon carbide at atmospheric pressure
title_sort microwave plasma synthesis of nano sized silicon carbide at atmospheric pressure
topic Plasma chemistry
Silicon carbide
Microwave plasma
Nanoparticles
UCTD
Engineering, built environment and information technology theses SDG-09
SDG-09: Industry, innovation and infrastructure
Engineering, built environment and information technology theses SDG-12
SDG-12: Responsible consumption and production
Engineering, built environment and information technology theses SDG-07
SDG-07: Affordable and clean energy
url http://hdl.handle.net/2263/43762