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A roadmap towards NanoElectroMechanical systems
Thesis (MScEng (Electrical and Electronic Engineering))--University of Stellenbosch, 2009.
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| Other Authors: | |
| Format: | Thesis |
| Language: | English |
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Stellenbosch : University of Stellenbosch
2009
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| _version_ | 1867613909616164864 |
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| access_status_str | Open Access |
| author | Terblanche, Eugene |
| author2 | Perold, W. J. |
| author_browse | Perold, W. J. Terblanche, Eugene |
| author_facet | Perold, W. J. Terblanche, Eugene |
| author_sort | Terblanche, Eugene |
| collection | Thesis |
| dc_rights_str_mv | University of Stellenbosch |
| description | Thesis (MScEng (Electrical and Electronic Engineering))--University of Stellenbosch, 2009. |
| format | Thesis |
| id | oai:scholar.sun.ac.za:10019.1/2229 |
| institution | Stellenbosch University (South Africa) |
| language | English |
| last_indexed | 2026-06-10T12:43:38.086Z |
| license_str | Other — see source repository |
| provenance_str_mv | Harvested via OAI-PMH from SUNScholar — Stellenbosch University Repository |
| publishDate | 2009 |
| publishDateRange | 2009 |
| publishDateSort | 2009 |
| publisher | Stellenbosch : University of Stellenbosch |
| publisherStr | Stellenbosch : University of Stellenbosch |
| record_format | dspace |
| source_str | SUNScholar — Stellenbosch University Repository |
| spelling | oai:scholar.sun.ac.za:10019.1/2229 A roadmap towards NanoElectroMechanical systems Terblanche, Eugene Perold, W. J. University of Stellenbosch. Faculty of Engineering. Dept. of Electrical and Electronic Engineering. Microelectromechanical systems Nanoelectromechanical systems Nanotechnology Dissertations -- Electronic engineering Theses -- Electronic engineering Electrical and Electronic Engineering Thesis (MScEng (Electrical and Electronic Engineering))--University of Stellenbosch, 2009. Nanoelectromechanical systems (NEMS) are the integration of nanotechnology and microelectromechanical systems (MEMS). The idea of this thesis is to give a basic preparation to approach NEMS, a subcategory of nanotechnology. This is performed by gaining knowledge of the two separate fields NEMS consist of, namely MEMS and nanotechnology. This document will discuss the basic theory and fabrication tools for microelectromechanical systems, as well as its limits as MEMS feature sizes decrease, reaching toward nanotechnology. It starts with an introduction that includes the history, giving a basic background. The essence is captured with theory of the equipment, the main material, some concepts of design and the creation of structures. To stimulate further interest, this thesis also illustrates practical design and fabrication methods. With the knowledge and skills that were discussed, one should be ready to get started with NEMS. 2009-03-03T10:03:06Z 2010-06-01T08:43:49Z 2009-03-03T10:03:06Z 2010-06-01T08:43:49Z 2009-03 Thesis http://hdl.handle.net/10019.1/2229 en University of Stellenbosch application/pdf Stellenbosch : University of Stellenbosch |
| spellingShingle | Microelectromechanical systems Nanoelectromechanical systems Nanotechnology Dissertations -- Electronic engineering Theses -- Electronic engineering Electrical and Electronic Engineering Terblanche, Eugene A roadmap towards NanoElectroMechanical systems |
| title | A roadmap towards NanoElectroMechanical systems |
| title_full | A roadmap towards NanoElectroMechanical systems |
| title_fullStr | A roadmap towards NanoElectroMechanical systems |
| title_full_unstemmed | A roadmap towards NanoElectroMechanical systems |
| title_short | A roadmap towards NanoElectroMechanical systems |
| title_sort | roadmap towards nanoelectromechanical systems |
| topic | Microelectromechanical systems Nanoelectromechanical systems Nanotechnology Dissertations -- Electronic engineering Theses -- Electronic engineering Electrical and Electronic Engineering |
| url | http://hdl.handle.net/10019.1/2229 |
| work_keys_str_mv | AT terblancheeugene aroadmaptowardsnanoelectromechanicalsystems AT terblancheeugene roadmaptowardsnanoelectromechanicalsystems |