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Synthesis of silicon-carbon films by induction-assisted plasma-chemical deposition
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| Published in: | Modern Electronic Materials |
|---|---|
| Format: | Online Article RSS Article |
| Published: |
2023
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| Subjects: | |
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| _version_ | 1864030188287819780 |
|---|---|
| collection | WordPress RSS FRELIP Feed Integration |
| container_title | Modern Electronic Materials |
| description | |
| discipline_display | Technology & Engineering |
| discipline_facet | Technology & Engineering |
| format | Online Article RSS Article |
| genre | Journal Article |
| id | rss_article:12757 |
| institution | FRELIP |
| journal_source_facet | Modern Electronic Materials |
| publishDate | 2023 |
| publishDateSort | 2023 |
| record_format | rss_article |
| spellingShingle | Synthesis of silicon-carbon films by induction-assisted plasma-chemical deposition Manufacturing and Technology Technology & Engineering — Computing Technology & Engineering |
| sub_discipline_display | Technology & Engineering — Computing |
| sub_discipline_facet | Technology & Engineering — Computing |
| subject_display | Manufacturing and Technology Technology & Engineering — Computing Technology & Engineering Manufacturing and Technology Technology & Engineering — Computing Technology & Engineering |
| subject_facet | Manufacturing and Technology Technology & Engineering — Computing Technology & Engineering |
| title | Synthesis of silicon-carbon films by induction-assisted plasma-chemical deposition |
| title_auth | Synthesis of silicon-carbon films by induction-assisted plasma-chemical deposition |
| title_full | Synthesis of silicon-carbon films by induction-assisted plasma-chemical deposition |
| title_fullStr | Synthesis of silicon-carbon films by induction-assisted plasma-chemical deposition |
| title_full_unstemmed | Synthesis of silicon-carbon films by induction-assisted plasma-chemical deposition |
| title_short | Synthesis of silicon-carbon films by induction-assisted plasma-chemical deposition |
| title_sort | synthesis of silicon-carbon films by induction-assisted plasma-chemical deposition |
| topic | Manufacturing and Technology Technology & Engineering — Computing Technology & Engineering |
| url | https://moem.pensoft.net/article/116552/ |