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Electron beam decomposition of CdCl2

The e-beam stimulated reaction, CdCl2 (s)----Cd(s) + 2Cl(g), has been studied in cadmium chloride thin films between 303 and 483K using 2-keV electrons. The dose required to make 90-mm-deep holes at 483K is 3 X10-3 Ccm-2. Extrapolated dosing levels of ~6X10-5 C cm-2 are expected. The use of CdCl2 as...

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Published: 1984
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