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Electron beam decomposition of CdCl2
The e-beam stimulated reaction, CdCl2 (s)----Cd(s) + 2Cl(g), has been studied in cadmium chloride thin films between 303 and 483K using 2-keV electrons. The dose required to make 90-mm-deep holes at 483K is 3 X10-3 Ccm-2. Extrapolated dosing levels of ~6X10-5 C cm-2 are expected. The use of CdCl2 as...
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1984
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| LEADER | 00000njm a2000000a 4500 | ||
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| 001 | oai:repository.ui.edu.ng:123456789/1678 | ||
| 042 | |a dc | ||
| 720 | |a Green, M. |e author | ||
| 720 | |a Aidinis, C. J. |e author | ||
| 720 | |a Fakolujo, O. A. |e author | ||
| 260 | |c 1984 | ||
| 520 | |a The e-beam stimulated reaction, CdCl2 (s)----Cd(s) + 2Cl(g), has been studied in cadmium chloride thin films between 303 and 483K using 2-keV electrons. The dose required to make 90-mm-deep holes at 483K is 3 X10-3 Ccm-2. Extrapolated dosing levels of ~6X10-5 C cm-2 are expected. The use of CdCl2 as a positive-type electron resist in a new scheme is proposed. A working model, useful for considering the e-beam stimilated decomposition energetics and mechanism, is briefly discussed. | ||
| 024 | 8 | |a 0021-8979 | |
| 024 | 8 | |a 1089-7550 | |
| 024 | 8 | |a Journal of Applied Physics 57(2), pp. 631-633 | |
| 024 | 8 | |a ui_art_green_electron_1984 | |
| 024 | 8 | |a http://ir.library.ui.edu.ng/handle/123456789/1678 | |
| 245 | 0 | 0 | |a Electron beam decomposition of CdCl2 |